✦ LIBER ✦
Harmonic analysis of discharge voltages as a tool to control the RF sputtering deposition process
✍ Scribed by Vašina, P.; Dvořák, P.
- Book ID
- 121440076
- Publisher
- EDP Sciences
- Year
- 2009
- Tongue
- English
- Weight
- 245 KB
- Volume
- 85
- Category
- Article
- ISSN
- 0295-5075
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