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Hardness and elastic modulus of amorphous and nanocrystalline SiC and Si films

✍ Scribed by V. Kulikovsky; V. Vorlíček; P. Boháč; M. Stranyánek; R. Čtvrtlík; A. Kurdyumov; L. Jastrabik

Book ID: 108278355
Publisher: Elsevier Science
Year: 2008
Tongue: English
Weight: 660 KB
Volume: 202
Category: Article
ISSN: 0257-8972
DOI: 10.1016/j.surfcoat.2007.07.029

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