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โœฆ   LIBER   โœฆ
๐Ÿ“

Handbook of Semiconductor Silicon Technology

โœ Scribed by William C. O'Mara, Robert B. Haber, Lee P. Hunt

Publisher
William Andrew
Year
1990
Tongue
English
Leaves
815
Series
Materials Science and Process Technology
Edition
No Card Pocket
Category
Library
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โœฆ Synopsis

This handbook is a comprehensive summary of the science, technology and manufacturing of semiconductor silicon materials. Every known property of silicon is detailed. A complete set of binary phase diagrams is included. Practical aspects such as materials handling, safety, impurity and defect reduction are also discussed in depth. Fundamentals in the areas of silicon precursor compounds, polysilicon, silicon crystal growth, wafer fabrication, epitaxial and CVD deposition are addressed by experts in these fields. Materials properties covered include electrical, optical and mechanical properties, deep level impurities and carrier lifetime, and thermochemistry, as well as specific sections on oxygen, carbon, and nitrogen impurities. The book contains an extensive set of references, tables of materials constants, and silicon properties, and a presentation on the state of the art of materials manufacturing.

๐Ÿ“œ SIMILAR VOLUMES

Handbook of Semiconductor Silicon Techno
๐Ÿ“ Handbook of Semiconductor Silicon Technology
โœ O'Mara W. C., Herring R. B., Hunt L. P. ๐Ÿ“‚ Library ๐Ÿ“… 1990 ๐ŸŒ English

This handbook is a comprehensive summary of the science, technology and manufacturing of semiconductor silicon materials. Every known property of silicon is detailed. A complete set of binary phase diagrams is included. Practical aspects such as materials handling, safety, impurity and defect reduct

Handbook of Semiconductor Silicon Techno
๐Ÿ“ Handbook of Semiconductor Silicon Technology (Materials Science and Process Technology)
โœ William C. O'Mara, Robert B. Herring, Lee P. Hunt ๐Ÿ“‚ Library ๐Ÿ“… 1990 ๐Ÿ› William Andrew ๐ŸŒ English

This handbook is a comprehensive summary of the science, technology and manufacturing of semiconductor silicon materials. Every known property of silicon is detailed. A complete set of binary phase diagrams is included. Practical aspects such as materials handling, safety, impurity and defect red

Handbook of Silicon Semiconductor Metrol
๐Ÿ“ Handbook of Silicon Semiconductor Metrology
โœ Alain C. Diebold (Editor) ๐Ÿ“‚ Library ๐Ÿ“… 2001 ๐ŸŒ English

Containing more than 300 equations and nearly 500 drawings, photographs, and micrographs,this reference surveys key areas such as optical measurements and in-line calibration methods. It describes cleanroom-based measurement technology used during the manufacture of silicon integrated circuits and c