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Handbook of Deposition Technologies for Films and Coatings || Dedication

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Book ID: 121420006
Publisher: Elsevier
Year: 2010
Weight: 18 KB
Category: Article
ISBN: 081552031X
DOI: 10.1016/B978-0-8155-2031-3.00020-X

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This 3e, edited by Peter M. Martin, *PNNL 2005 Inventor of the Year*, is an extensive update of the many improvements in deposition technologies, mechanisms, and applications. This long-awaited revision includes updated and new chapters on atomic layer deposition, cathodic arc deposition, sculpted t