Hafnium nitride coatings prepared by very high rate reactive sputtering

✍ Scribed by William D. Sproul

• Publisher: Elsevier Science
• Year: 1984
• Tongue: English
• Weight: 464 KB
• Volume: 118
• Category: Article
• ISSN: 0040-6090
• DOI: 10.1016/0040-6090(84)90198-6