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H2plasma development of X-ray imaged patterns on plasma-polymerized resists

✍ Scribed by Masaru Hori; Tetsuya Miwa; Shuzo Hattori; Shinzo Morita

Book ID: 104861968
Publisher: Springer
Year: 1984
Tongue: English
Weight: 596 KB
Volume: 4
Category: Article
ISSN: 0272-4324
DOI: 10.1007/bf00647192

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