H+, Na+, and K+ ion sensing properties of sodium and aluminum coimplanted LPCVD silicon oxynitride thin films

✍ Scribed by Paik-Kyun Shin; Thomas Mikolajick

• Book ID: 108417989
• Publisher: Elsevier Science
• Year: 2003
• Tongue: English
• Weight: 205 KB
• Volume: 207
• Category: Article
• ISSN: 0169-4332
• DOI: 10.1016/s0169-4332(02)01527-1