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H atom plasma diagnostics: A sensitive probe of temperature and purity

✍ Scribed by James R. Dunlop; Angeliki D. Tserepi; Bryan L. Preppernau; Timothy M. Cerny; Terry A. Miller

Book ID
105201896
Publisher
Springer
Year
1992
Tongue
English
Weight
547 KB
Volume
12
Category
Article
ISSN
0272-4324

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## Abstract We report a study of electron saturation current variations at varying probe heating that were found to be closely related to probe wire contamination. The study was performed in three types of low temperature argon plasma – the weakly magnetized plasma of a cylindrical magnetron, the n