H+ and He+ ions used as a RBS probe of thin defective layers in silicon. A Monte Carlo study

✍ Scribed by A.M. Mazzone

• Book ID: 114172022
• Publisher: Elsevier Science
• Year: 2000
• Tongue: English
• Weight: 143 KB
• Volume: 168
• Category: Article
• ISSN: 0168-583X
• DOI: 10.1016/s0168-583x(99)01001-0