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H+ and D+ sputtering of thin tantalum films in the energy range of 0.6 to 15 keV

Book ID: 108390083
Publisher: Elsevier Science
Year: 1980
Tongue: English
Weight: 162 KB
Volume: 30
Category: Article
ISSN: 0042-207X
DOI: 10.1016/s0042-207x(80)80547-1

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