Großflächige Quellen f�r die industrielle Plasmatechnik. Large area plasma sources for industrial applications

✍ Scribed by K.-M. Baumgärtner; H. Muegge

• Book ID: 101380596
• Publisher: John Wiley and Sons
• Year: 2001
• Tongue: English
• Weight: 250 KB
• Volume: 13
• Category: Article
• ISSN: 0947-076X
• DOI: 10.1002/1522-2454(200106)13:3<188::aid-vipr188>3.0.co;2-j