Theoretical Modelling of Oxide Thin Film
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J.L. JimΓ©nez-PΓ©rez; P.H. Sakanaka; M.A. Algatti; J.G. Mendoza-Alvarez; A. Cruz O
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Article
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2000
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John Wiley and Sons
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English
β 101 KB
This paper considers theoretical modelling and experimental investigation of TiO 2 film growth on Ti films previously deposited on glass substrates. The Ti oxidation occurs due to film surface heating by a moving beam of a pulsed Nd : YAG laser that sweeps the surface at a constant speed of 2 mm/s,