Growth process of YBa2Cu3O7−x films prepared by RF thermal plasma evaporation
✍ Scribed by Tsujino Jiro; Shiohara Yuh
- Publisher
- Elsevier Science
- Year
- 1996
- Tongue
- English
- Weight
- 429 KB
- Volume
- 262
- Category
- Article
- ISSN
- 0921-4534
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✦ Synopsis
We prepared YBa2Cu3OT_ x films on (100) SrTiO 3 by RF thermal plasma evaporation, and investigated the growth mechanisms by observation of the film surface using atomic force microscopy. As a result, a growth process by 2D multiple nucleation and coalescence was seen in the initial stage of 5 s-30 s. However, the growth mode of the film prepared for 3 min changed to spiral growth. Since a little inclination between the vicinal grains was observed in the film for 30 s, coalescence of these grains in the initial stage may be the origin of the spiral growth. In addition, using 10 ° (100) off SrTiO 3 and (110) NdGaO 3 substrates, the effects of roughness and misfit between the film and the substrate were investigated.
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