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Growth of ZnO Nanostructures Produced by MOCVD: A Study of the Effect of the Substrate

✍ Scribed by Alfio A. Scalisi; Roberta G. Toro; Graziella Malandrino; Maria E. Fragalà; Giuseppe Pezzotti


Publisher
John Wiley and Sons
Year
2008
Tongue
English
Weight
244 KB
Volume
14
Category
Article
ISSN
0948-1907

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## Abstract Using metal–organic (MO)CVD, lanthanum trifluoride (LaF~3~) and oxyfluoride (LaOF) films are deposited on Si(100), glass, and quartz from a La(hfa)~3~diglyme single‐source precursor. The films are characterized using X‐ray diffraction (XRD), scanning electron microscopy (SEM), and atomi