Growth of void-free 3C-SiC films by modified two-step carbonization methods

✍ Scribed by Jianfeng Su; Qiang Niu; Chunjuan Tang; Yongsheng Zhang; Zhuxi Fu

• Book ID: 113914373
• Publisher: Elsevier Science
• Year: 2012
• Tongue: English
• Weight: 675 KB
• Volume: 14
• Category: Article
• ISSN: 1293-2558
• DOI: 10.1016/j.solidstatesciences.2012.01.017