✦ LIBER ✦
Growth of thin thermal silicon dioxide films with low defect density : R. Singh. Microelectronics Journal23, 273 (1992)
- Publisher
- Elsevier Science
- Year
- 1993
- Tongue
- English
- Weight
- 115 KB
- Volume
- 33
- Category
- Article
- ISSN
- 0026-2714
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