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Growth of thick AlN epilayers with droplet-free and atomically smooth surface by plasma-assisted molecular beam epitaxy using laser reflectometry monitoring

✍ Scribed by V.N. Jmerik; A.M. Mizerov; D.V. Nechaev; P.A. Aseev; A.A. Sitnikova; S.I. Troshkov; P.S. Kop'ev; S.V. Ivanov


Book ID
116630362
Publisher
Elsevier Science
Year
2012
Tongue
English
Weight
762 KB
Volume
354
Category
Article
ISSN
0022-0248

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