Growth of silicon microcrystals in thin surface layers of quartz glass with vacuum ultraviolet laser processing

✍ Scribed by Kou Kurosawa; Wataru Sasaki; Yasuo Takigawa; Masato Ohmukai; Masahito Katto; Masahiro Okuda

• Publisher: Elsevier Science
• Year: 1993
• Tongue: English
• Weight: 330 KB
• Volume: 70-71
• Category: Article
• ISSN: 0169-4332
• DOI: 10.1016/0169-4332(93)90607-d