✦ LIBER ✦
Growth of SiGe film by using a single-wafer rapid thermal processing UHV/CVD system
✍ Scribed by Wentao Huang; Changchun Chen; Xiyou Li; Xiaoyi Xiong; Zhihong Liu; Wei Zhang; Jun Xu; Pei-hsin Tsien
- Book ID
- 105696621
- Publisher
- TechnoPress
- Year
- 2004
- Tongue
- English
- Weight
- 381 KB
- Volume
- 10
- Category
- Article
- ISSN
- 1598-9623
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