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Growth of particle-free YBa2Cu3O7 films by off-axis sputtering

✍ Scribed by B. Wuyts; Z.X. Gao; S. Libbrecht; M. Maenhoudt; E. Osquiguil; Y. Bruynseraede

Book ID
103945409
Publisher
Elsevier Science
Year
1992
Tongue
English
Weight
481 KB
Volume
203
Category
Article
ISSN
0921-4534

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Growth of a-axis oriented YBa2Cu3O7-x thin films on LaSrGaO4 and SrTiO3 single crystal substrates by off-axis rf sputtering
✍ Yong Ki Park; Dong Han Ha; Keunseop Park; Jong-Chul Park πŸ“‚ Article πŸ“… 1994 πŸ› Elsevier Science 🌐 English βš– 190 KB

YBa,Cu,O,\_x superconducting thin films with a-axis perpendicular to the substrate were grown on both LaSrGaO, (100) and SrTiO, (100) single crystals by off-axis rf sputtering and their properties were compared. The film grown at 740 "C on a self-template layer grown in situ at 650 "C on LaSrGaO, (1