✦ LIBER ✦
Growth of Mixed-Phase Amorphous and Ultra Nanocrystalline Silicon Thin Films in the Low Pressure Regime by a VHF PECVD Process
✍ Scribed by Jhuma Gope; Sushil Kumar; Sukhbir Singh; C. M. S. Rauthan; P. C. Srivastava
- Book ID
- 113108069
- Publisher
- Springer Netherlands
- Year
- 2012
- Tongue
- English
- Weight
- 585 KB
- Volume
- 4
- Category
- Article
- ISSN
- 1876-990X
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