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Growth of Low Basal Plane Dislocation Density 4H-SiC Crystals in Controlled Temperature Distribution inside the Crucible

✍ Scribed by Tsuge, H.; Ushio, S.; Sato, S.; Katsuno, M.; Fujimoto, T.; Yano, T.


Book ID
120643455
Publisher
Trans Tech Publications, Ltd.
Year
2013
Tongue
English
Weight
497 KB
Volume
740-742
Category
Article
ISSN
1662-9752

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