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Growth of high-quality relaxed SiGe films with an intermediate Si1−yCy layer for strained Si n-MOSFETs

✍ Scribed by P.S. Chen; S.W. Lee; K.F. Liao


Book ID
108215359
Publisher
Elsevier Science
Year
2006
Tongue
English
Weight
465 KB
Volume
130
Category
Article
ISSN
0921-5107

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