✦ LIBER ✦
Growth of Dysprosium-, Scandium-, and Hafnium-based Third Generation High-κ Dielectrics by Atomic Vapor Deposition
✍ Scribed by C. Adelmann; P. Lehnen; S. Van Elshocht; C. Zhao; B. Brijs; A. Franquet; T. Conard; M. Roeckerath; J. Schubert; O. Boissière; C. Lohe; S. De Gendt
- Book ID
- 102133729
- Publisher
- John Wiley and Sons
- Year
- 2007
- Tongue
- English
- Weight
- 409 KB
- Volume
- 13
- Category
- Article
- ISSN
- 0948-1907
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