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Growth of aluminum nitride on (111) silicon: Microstructure and interface structure

✍ Scribed by Bourret, A.; Barski, A.; Rouvière, J. L.; Renaud, G.; Barbier, A.

Book ID
120066758
Publisher
American Institute of Physics
Year
1998
Tongue
English
Weight
699 KB
Volume
83
Category
Article
ISSN
0021-8979

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