✦ LIBER ✦
Growth of 3C-SiC Thin Film on AlN/Si(100) with Atomically Abrupt Interface via Tailored Precursor Feeding Procedure
✍ Scribed by Lien, Wei-Cheng; Cheng, Kan Bun; Senesky, Debbie G.; Carraro, Carlo; Pisano, Albert P.; Maboudian, Roya
- Book ID
- 121877298
- Publisher
- The Electrochemical Society
- Year
- 2010
- Tongue
- English
- Weight
- 448 KB
- Volume
- 13
- Category
- Article
- ISSN
- 1099-0062
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