Growth model of hydrogenated microcrystalline silicon prepared by RF sputtering method in pure hydrogen

✍ Scribed by H. Fujishiro; S. Furukawa

• Publisher: Elsevier Science
• Year: 1990
• Tongue: English
• Weight: 337 KB
• Volume: 73
• Category: Article
• ISSN: 0038-1098
• DOI: 10.1016/0038-1098(90)90140-7