✦ LIBER ✦
Growth mode and texture development in TiN films during magnetron sputtering – An in situ synchrotron radiation study
✍ Scribed by N. Schell; J. Bøttiger; W. Matz; J. Chevallier
- Book ID
- 114166202
- Publisher
- Elsevier Science
- Year
- 2003
- Tongue
- English
- Weight
- 281 KB
- Volume
- 199
- Category
- Article
- ISSN
- 0168-583X
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