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Growth methodologies and characterization of different polycrystalline diamond films on Ta substrates

✍ Scribed by M.L. Terranova; M. Rossi; V. Sessa; G. Vitali

Book ID
107864534
Publisher
Elsevier Science
Year
1994
Tongue
English
Weight
490 KB
Volume
241
Category
Article
ISSN
0040-6090

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## Abstract By optimizing seeding techniques and plasma parameters for deposition, nanocrystalline diamond (NCD) films were deposited on different sorts of substrates with varying parameters such as temperature and methane content. Results of this optimization process were analysed by SEM, XRD, Ram