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Growth mechanism of TiN film on dielectric films and the effects on the work function

✍ Scribed by K. Choi; P. Lysaght; H. Alshareef; C. Huffman; H.-C. Wen; R. Harris; H. Luan; P.-Y. Hung; C. Sparks; M. Cruz; K. Matthews; P. Majhi; B.H. Lee

Book ID
108287757
Publisher
Elsevier Science
Year
2005
Tongue
English
Weight
312 KB
Volume
486
Category
Article
ISSN
0040-6090

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## Abstract Nanocrystalline diamond/amorphous carbon (NCD/a‐C) composite films have been deposited by microwave chemical vapour deposition from methane‐rich CH~4~/N~2~ mixtures and characterized carefully by a variety of methods with respect to morphology and structure, composition, crystallinity,