Growth frustration of YBaCuO films at the transition from a- to c-axis orientation
β Scribed by R. Schneider; J. Reiner; J. Geerk; O. Meyer; G. Linker
- Publisher
- Elsevier Science
- Year
- 1994
- Tongue
- English
- Weight
- 413 KB
- Volume
- 89
- Category
- Article
- ISSN
- 0038-1098
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This paper deals with experimental design applied to response surface methodology (RSM) in order to determine the influence of the discharge conditions on preferred c-axis orientation of sputtered AlN thin films. The thin films have been deposited by DC reactive magnetron sputtering on Si (1 0 0) su
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