Growth evolution of thin films from vapor: The role of small mobility clusters at the nucleation stage

✍ Scribed by Qingyi Shao; Rongchuan Fang; Guanzhong Wang; Zengquan Xue

• Publisher: Elsevier Science
• Year: 2000
• Tongue: English
• Weight: 338 KB
• Volume: 40
• Category: Article
• ISSN: 0960-8974
• DOI: 10.1016/s0960-8974(00)00036-x

✦ Synopsis

A simple equation is introduced to reveal the kinetics for nucleation and growth of thin films from the vapor involving small mobility clusters. Applying the simple equation into the growth of diamond films, a quantitative evolution for the nucleation density was obtained. All the calculated results are agreement with experimental data. The results may provide a route for controlling the nucleation and growth by proper adjustment of the growth conditions in growth of thin films with small mobility clusters.