Growth behavior of cubic boron nitride (cBN) phase in B-C-N film deposited on Si substrate with non-uniform ion flux

✍ Scribed by Seung-Min Lee, Tae-Yeon Seong, Wook-Seong Lee…

• Book ID: 120908179
• Publisher: TechnoPress
• Year: 2013
• Tongue: English
• Weight: 864 KB
• Volume: 19
• Category: Article
• ISSN: 1598-9623
• DOI: 10.1007/s12540-013-3031-9