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Growth and structural characterization of ZnO on Y2O3/YSZ by pulsed laser deposition

✍ Scribed by Chih-Wei Lin; Yen-Teng Ho; Li Chang

Book ID
113782409
Publisher
Elsevier Science
Year
2008
Tongue
English
Weight
688 KB
Volume
108
Category
Article
ISSN
0254-0584

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## Abstract Sn:ZnO thin films with different Sn concentrations were grown by pulsed laser deposition (PLD) onto single‐crystal Si(001) substrates at an oxygen pressure of 2 Γ— 10^–2^ mbar and substrate temperature of 600 Β°C. The targets used were high density Sn:ZnO pellets with different Sn concent