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Growth and properties of completely amorphous vanadium oxide cathode thin film with Pt co-sputtering method

✍ Scribed by Han -Ki Kim; Tae -Yeon Seong; S. M. Lee; Young Soo Yoon


Publisher
TechnoPress
Year
2003
Tongue
English
Weight
552 KB
Volume
9
Category
Article
ISSN
1598-9623

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## Abstract Transparent thin films of amorphous zinc indium tin oxide were prepared at room temperature by co‐sputtering of zinc oxide and indium tin oxide. Effect of oxygen partial pressure on the optical and electrical properties of amorphous zinc indium tin oxide thin films were investigated. Co