✦ LIBER ✦
Growth and modification of thin SiGeC films at low substrate temperatures through UV laser assisted processing
✍ Scribed by E López; S Chiussi; J Serra; P González; C Serra; U Kosch; B León; F Fabbri; L Fornarini; S Martelli
- Publisher
- Elsevier Science
- Year
- 2004
- Tongue
- English
- Weight
- 310 KB
- Volume
- 234
- Category
- Article
- ISSN
- 0169-4332
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