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Growth and misfit accommodation of β-SiC precipitates in silicon as implanted by oxygen

✍ Scribed by J. G. Antonopoulos; J. Stoemenos; C. Jaussaud; J. Margail


Book ID
104906543
Publisher
Springer
Year
1989
Tongue
English
Weight
435 KB
Volume
8
Category
Article
ISSN
0261-8028

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