✦ LIBER ✦
Growth and doping of SiC-thin films on low-stress, amorphous Si3N4/Si substrates for robust microelectromechanical systems applications
✍ Scribed by L. Cheng; M. Pan; J. Scofield; A. J. Steckl
- Publisher
- Springer US
- Year
- 2002
- Tongue
- English
- Weight
- 369 KB
- Volume
- 31
- Category
- Article
- ISSN
- 0361-5235
No coin nor oath required. For personal study only.