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Growth and characterisation of amorphous carbon films doped with nitrogen

✍ Scribed by N.P. Barradas; R.U.A. Khan; J.V. Anguita; S.R.P. Silva; U. Kreissig; R. Grötzschel; W. Möller

Book ID
114171799
Publisher
Elsevier Science
Year
2000
Tongue
English
Weight
152 KB
Volume
161-163
Category
Article
ISSN
0168-583X

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Nanostructured hydrogenated amorphous ca
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## Abstract The synthesis of nanostructured hydrogenated amorphous carbon (a‐C:H) films doped with nitrogen using microwave‐assisted surface wave plasma chemical vapour deposition on quartz and p‐silicon substrates is reported. By controlling the deposition parameters, the Tauc band gap has been va