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“Greening” the synthesis of SrBi2Ta2O9 thin films

✍ Scribed by Gerardo González-Aguilar; Isabel M. Miranda Salvado; M. Elisabete V. Costa

Book ID
113789143
Publisher
Elsevier Science
Year
2006
Tongue
English
Weight
147 KB
Volume
60
Category
Article
ISSN
0167-577X

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Role of interfacial diffusion in SrBi2Ta
Role of interfacial diffusion in SrBi2Ta2O9 thin-film capacitors
✍ Ai-Dong Li; Di Wu; Hui-Qin Ling; Tao Yu; Zhi-Guo Liu; Nai-Ben Ming 📂 Article 📅 2003 🏛 Elsevier Science 🌐 English ⚖ 322 KB

SrBi Ta O (SBT) thin films were prepared on Pt / TiO / SiO / Si substrates by metalorganic decomposition 2 2 9 2 2 method. Impact of interfacial diffusion on structural and electrical properties of SBT film capacitors has been investigated by X-ray diffraction (XRD), scanning electron microscopy, Au