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Graphoepitaxial assembly of asymmetric ternary blends of block copolymers and homopolymers

✍ Scribed by Stuen, Karl O; Detcheverry, François A; Craig, Gordon S W; Thomas, Carla S; Farrell, Richard A; Morris, Michael A; de Pablo, Juan J; Nealey, Paul F


Book ID
120227650
Publisher
Institute of Physics
Year
2010
Tongue
English
Weight
360 KB
Volume
21
Category
Article
ISSN
0957-4484

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## Abstract The morphology of a thin film was studied for a binary mixture of asymmetric PS‐__b__‐PMMA block copolymers on a flat silicon wafer coated with 50 nm thick silicon oxide. AFM and TEM reveal that the PMMA cylinders orient perpendicular to the substrate by tuning the film thickness. Furth