Graphic script provides quick classification of GaAs wafers
✍ Scribed by Millard G. Mier
- Book ID
- 104365202
- Publisher
- Elsevier Science
- Year
- 2000
- Tongue
- English
- Weight
- 581 KB
- Volume
- 13
- Category
- Article
- ISSN
- 0961-1290
No coin nor oath required. For personal study only.
✦ Synopsis
Infrared transmission topography has long been used to detect variations in gallium arsenide wafers that can cause dark-line defects that limit lifetime of CaAs lasers and solar cells. In the past, infrared transmission was measured over a whole wafer by scanning a small spot mechanically. Absorption was calculated at each location across the surface of the wafer and used to produce colour-coded plots that allow the wafer's characteristics to be determined at a glance. The program ran on VAXNMS computers, but these are being taken out of service due to obsolescence. To overcome these problems, the author developed a graphics script using a state-of-the-art data analysis program which provides quick classification of CaAs wafers based on traps and defects, but runs on inexpensive personal computers and, as a bonus, produces bit-map plots that can be cut and pasted into Windows word processing and presentation software.