Grain refinement with increasing magnetron discharge power in sputter deposition of nanostructured titanium aluminium nitride coatings

✍ Scribed by R. Wuhrer; W.Y. Yeung

• Book ID: 113894919
• Publisher: Elsevier Science
• Year: 2004
• Tongue: English
• Weight: 371 KB
• Volume: 50
• Category: Article
• ISSN: 1359-6462
• DOI: 10.1016/j.scriptamat.2003.12.022