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Glow discharge processes. Sputtering and plasma etching

✍ Scribed by Chapman B.,

Tongue
English
Leaves
214
Category
Library
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✦ Synopsis

Wiley, New York, 1980, 406 c.
Книга содержит следующие разделы:
Газы
Процессы столкновений в газовой фазе
Плазма
Тлеющие разряды постоянного тока
ВЧ разряды
Распыление
Плазменное травление

✦ Subjects

Физика;Физика плазмы

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