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Global (volume-averaged) model of inductively coupled chlorine plasma: Influence of Cl wall recombination and external heating on continuous and pulse-modulated plasmas
✍ Scribed by Kemaneci, Efe; Carbone, Emile; Booth, Jean-Paul; Graef, Wouter; van Dijk, Jan; Kroesen, Gerrit
- Book ID
- 124102033
- Publisher
- Institute of Physics
- Year
- 2014
- Tongue
- English
- Weight
- 686 KB
- Volume
- 23
- Category
- Article
- ISSN
- 0963-0252
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