Anodic bonding of glasses with interlaye
โ
Piotr Mrozek
๐
Article
๐
2009
๐
Elsevier Science
๐
English
โ 200 KB
Thermal processing parameters of vacuum deposited titanium thin films are determined for anodic bonding of glass plates with interlayers for fully transparent device applications. Vacuum thin film deposition and sealing conditions strongly influence the quality of the bonds. 10 -4 hPa and 10 -5 hPa