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Glass as a dielectric

โœ Scribed by George W. Morey


Book ID
104129941
Publisher
Elsevier Science
Year
1935
Tongue
English
Weight
666 KB
Volume
219
Category
Article
ISSN
0016-0032

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In this paper, we used Fourier transform infrared spectroscopy (FTIR) to study the curing process and thermal stability of a low-k organic SOG (spin-on glass), methyl silsesquioxane (MSQ). The solvent was completely driven out and the MSQ had a high degree of cross-linking after baking. Curing at a