GIXS/AES Study of Polycrystalline Titanium and Titanium Oxide Films Sputtered on Si Substrate

✍ Scribed by Suzuki, S. ;Kosaka, T. ;Sato, S. ;Saito, M. ;Matsubara, E. ;Waseda, Y.

• Publisher: John Wiley and Sons
• Year: 1997
• Tongue: English
• Weight: 201 KB
• Volume: 161
• Category: Article
• ISSN: 0031-8965
• DOI: 10.1002/1521-396x(199705)161:1<193::aid-pssa193>3.0.co;2-r