✦ LIBER ✦
Gettering efficiencies for Cu and Ni as a function of size and density of oxygen precipitates in p/p- silicon epitaxial wafers
✍ Scribed by R. Hölzl; L. Fabry; K.J. Range
- Book ID
- 106024025
- Publisher
- Springer
- Year
- 2001
- Tongue
- English
- Weight
- 297 KB
- Volume
- 73
- Category
- Article
- ISSN
- 1432-0630
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