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Germanium films on sapphire and germanium substrates

โœ Scribed by Johannessen, J. S.


Publisher
John Wiley and Sons
Year
1972
Tongue
English
Weight
727 KB
Volume
10
Category
Article
ISSN
0031-8965

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Germanium on sapphire substrates for sys
โœ H.S. Gamble; B.M. Armstrong; P.T. Baine; Y.H. Low; P.V. Rainey; Y.W. Low; D.W. M ๐Ÿ“‚ Article ๐Ÿ“… 2008 ๐Ÿ› Elsevier Science ๐ŸŒ English โš– 367 KB

Germanium on sapphire (GeOS) is proposed for system on a chip applications. Sapphire substrates are demonstrated to exhibit lower rf losses and superior crosstalk suppression compared with oxidised silicon handle wafers. Inductors on sapphire also show higher quality factor and better frequency resp